Ultra High Vacuum Systems

Custom Vacuum Chamber Fabrication

Ultra High Vacuum systems are one of IMT Precision's signature capabilities. We fabricate custom vacuum chambers from scratch — machining chamber bodies and lids, welding ports and flanges, and assembling completed UHV systems that ship helium leak–tested and ready for installation. Our projects range from one-of-a-kind research apparatus to production-quantity chambers for semiconductor equipment OEMs.

End-to-End UHV Capability

Every step of our UHV process happens in-house. We machine the chamber bodies on our large-envelope CNC mills, weld them using specialized UHV TIG procedures with AWS-certified welders, and verify seal integrity with helium leak detection. The chamber never leaves our facility until it meets your vacuum specification.

We work primarily with aluminum, stainless steel, and carbon steel for UHV applications, and we understand the surface finish requirements, cleaning protocols, and handling procedures that vacuum work demands.

Who We Build For

Our UHV chambers and assemblies serve semiconductor equipment manufacturers, national laboratories, space systems companies, and research institutions. Whether it's a 10"-diameter test chamber or an 8-foot process tool enclosure, we have the equipment footprint and the expertise to deliver it.

Key Equipment for UHV Work

• Machining: Viper PRW-5340 and B5000GDW bridge mills for large chamber bodies; HAAS VF-6/50 and VF-5/50TR 5-axis centers for complex port geometries and lid features
• Welding: (3x) Miller Dynasty 700 TIG welders (500A, 100% duty cycle) for precision UHV weld procedures; Miller Syncrowave 350LX for supplementary TIG work
• Leak Testing: ASM 182T Helium Leak Detector — detectable leak rate <3×10⁻¹⁰ mbar·L/s, range 1×10⁻¹¹ to 1×10⁻¹ mbar·L/s
• Inspection: Nikon Altera S 10.7.6 CMM (accuracy from 1.8µm + L/400) and Faro Quantum M portable arm for on-machine verification
• Assembly: PEMSerter press, Dake 50H hydraulic press, and torque-controlled tooling for final assembly

Frequently Asked Questions

Do you build vacuum chambers?

Yes — custom Ultra High Vacuum (UHV) chambers are one of our signature capabilities. We machine chamber bodies and lids on our bridge mills, weld ports and flanges using AWS-certified UHV TIG procedures, and helium leak-test every assembly to <3×10⁻¹⁰ mbar·L/s before it ships.